Publication details
Mode transition in r.f. capacitive discharge in hydrogen
| Authors | |
|---|---|
| Year of publication | 2003 |
| Type | Article in Proceedings |
| Conference | Proceedings of 26th ICPIG |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | rf capacitive discharges; mode transition; hydrogen |
| Description | We have studied low-pressure capacitively coupled rf discharges in hydrogen. Two different discharge modes were observed. These two modes differ significantly in the plasma potential and in the nature of sheaths. For diagnostic purposes the Plasma Process Monitor, optical emission spectroscopy and Lamgmuir probe were used. |
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