Informace o publikaci
Mode transition in r.f. capacitive discharge in hydrogen
| Autoři | |
|---|---|
| Rok publikování | 2003 |
| Druh | Článek ve sborníku |
| Konference | Proceedings of 26th ICPIG |
| Fakulta / Pracoviště MU | |
| Citace | |
| Obor | Fyzika plazmatu a výboje v plynech |
| Klíčová slova | rf capacitive discharges; mode transition; hydrogen |
| Popis | We have studied low-pressure capacitively coupled rf discharges in hydrogen. Two different discharge modes were observed. These two modes differ significantly in the plasma potential and in the nature of sheaths. For diagnostic purposes the Plasma Process Monitor, optical emission spectroscopy and Lamgmuir probe were used. |
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