Hard carbon films: Deposition and diagnostics

• Authors: FRGALA Zdeněk; KUDRLE Vít; JANČA Jan; MEŠKO Marcel; ELIÁŠ Marek; BURŠÍK Jiří
• Year of publication: 2003
• Type: Article in Periodical
• Magazine / Source: Acta Physica Slovaca
• MU Faculty or unit: Faculty of Informatics
• Field: Plasma physics
• Keywords: Diamond; microwave plasma CVD

Attached files

• 385.pdf

• Description: We studied the growth of microcrystalline diamond films on pre-treated Si and WC-Co substrates by microwave plasma chemical vapour deposition (MPCVD). The pre-treatment was varied and its effect on diamond film was studied.

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