Publication details
Electrical conductivity of Si incorporated diamond-like carbon films deposited by PECVD
| Authors | |
|---|---|
| Year of publication | 2003 |
| Type | Article in Proceedings |
| Conference | Juniormat 2003 |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | PECVD; HMDSO; Electrical conductivity |
| Description | Electrical conductivity of Si incorporated diamond - like carbon films deposited by PECVD |