Diamond Growth on silicon and WC-Co by microwave plasma chemical vapor deposition

• Authors: FRGALA Zdeněk; KUDRLE Vít; JANČA Jan; BURŠÍKOVÁ Vilma; VAŠINA Petr; MEŠKO Marcel; BURŠÍK Jiří; KADLEČÍKOVÁ M.; KLAPETEK Petr
• Year of publication: 2003
• Type: Article in Proceedings
• Conference: Proceedings of contributed papers WDS'03
• MU Faculty or unit: Faculty of Informatics
• Field: Plasma physics
• Keywords: PECVD; diamond; WC; raman spectra; SEM
• Description: Diamond Growth on silicon and WC=Co by microwave plasma chemical vapor deposition

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