Reduction of tungsten precursors in inductive rf discharge plasma reactors

• Authors: JANČA Jan; ELIÁŠ Marek; BROŽEK Vlastimil
• Year of publication: 2003
• Type: Article in Periodical
• Magazine / Source: High Temperature Material Processes
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: tungsten; tungsten carbide; plasma reduction; plasma carbidization;inductive coupled .h.f. plasma reactor
• Description: Ammonium paratungstate (APT) was reduced in inductively coupled h.f. plasma reactor(4 MHz,2 kW). As working gas was used hydrogen. If the mixture of hydrogen with hydrocarbon is used (methane, propan butane)it is possible to prepare also tungsten carbide in the ratio up to WC/W=80/20.

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