Energy distribution functions of ions impinging on substrate in microwave plasma

• Authors: MEŠKO Marcel; CICMAN Peter; OHTSU Y.; FUJITA H.; KUDRLE Vít
• Year of publication: 2004
• Type: Article in Periodical
• Magazine / Source: Journal of physics D: Applied physics
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: IEDF; large area microwave plasma; sheath

Attached files

• d4_3_022.pdf

• Description: Using retarding field energy analyser, we measured ion energy distribution function of positive ions impinging on substrate in microwave plasma

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