Publication details
Preionised pulsed magnetron discharge for ionised physical vapour deposition
| Authors | |
|---|---|
| Year of publication | 2004 |
| Type | Article in Proceedings |
| Conference | Proceeding of Seventeenth European Conference on Atomic & Molecular Physics of Ionized Gases |
| MU Faculty or unit | |
| Citation | |
| Keywords | pulsed magnetron discharge preionization deposition |
| Description | To improve the quality of thin film deposition by magnetron discharges, particularly by an effective ionisation of sputtered vapour, we developed a new ionised physical vapour deposition method based on preionised magnetron discharges. By superposition of continuous, microwave or RF discharge, with a fast pulsed abnormal discharge, target current density is extended to very high values during short pulses. |