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Publication details
Mechanické vlastnosti plazmově deponovaných tenkých vrstev na různých substrátech
Title in English | Mechanical properties of PCVD thin solid films on various substrates |
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Authors | |
Year of publication | 2005 |
Type | Article in Proceedings |
Conference | 1. Slovensko - Český seminár "Lokálne mechanické vlastnosti" |
MU Faculty or unit | |
Citation | |
Field | Solid matter physics and magnetism |
Keywords | Thin solid films; microhardness; low temperature plasma |
Description | Mechanical properties of plasma deposited thin films on different substrates were investigated by mens of Depth Sensing Indentation method. The dependence on various parameters and temperature was studied. |
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