Complex study of the mechanical properties of a-Si:H and a-SiC:H thin films

• Authors: BURŠÍKOVÁ Vilma; SLÁDEK Petr; SŤAHEL Pavel; BURŠÍK Jiří
• Year of publication: 2005
• Type: Article in Proceedings
• Conference: Book of abstract - ICANS 21
• MU Faculty or unit: Faculty of Science
• Field: Solid matter physics and magnetism
• Keywords: amorphous semiconductor; mechanical properties; thin film
• Description: The aim of this study is to provide the complex study of the mechanical properties of a-SiH and a-SiC:H thin films prepared under different plasma conditions.

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