Study of the mechanical properties of thin films using combined nanoindentation and AFM measurements

• Authors: BURŠÍKOVÁ Vilma; KLAPETEK Petr; BOUSQUET Angelique; ELIÁŠ Marek
• Year of publication: 2005
• Type: Article in Periodical
• Magazine / Source: Jemná mechanika a optika
• MU Faculty or unit: Faculty of Science
• Field: Solid matter physics and magnetism
• Keywords: nanoindentation; AFM; thin films; mechanical properties
• Description: Study of the mechanical properties of thin films prepared by PECVD using combined nanoindentation and AFM measurements.

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