REFRACTORY METAL FILM DEPOSITION BY THERMIONIC VACUUM ARC METHOD

• Authors: MUSA G.; MUSTATA I.; LUNGU C.P.; SURDU BOB C.; VLADOIU R.; BURŠÍKOVÁ Vilma
• Year of publication: 2005
• Type: Article in Proceedings
• Conference: 17th ISPC
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: REFRACTORY METAL; FILM DEPOSITION; THERMIONIC VACUUM ARC METHOD
• Description: REFRACTORY METAL FILM DEPOSITION BY THERMIONIC VACUUM ARC METHOD

Related projects

• Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
• Multiscale approach to relationships between mechanical and microstructural characteristics of materials