Ionized physical vapor deposition by high power fast pulsed magnetron discharge

• Authors: GANCIU Mihai; VAŠINA Petr; MEŠKO Marcel; IMBERT Jean-Christophe; DE POUCQUES Ludovic; BOISSE-LAPORTE Caroline; BRETAGNE Jean; TOUZEAU Michel; VOLDOIRE Olivier; HUGON Marie-Christine; AGIUS Bernard
• Year of publication: 2005
• Type: Article in Proceedings
• Conference: Actes du workshop Nouveaux oxydes a forte permittivite dans l integration des semi-conducteurs
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: pulsed magnetron discharge; IPVD
• Description: Study of newly developed preionized (by low DC current) high power pulsed magnetron discharge.

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