Publication details
Evidence of refractive index change in glass substrates induced by high-density reactive ion plating deposition of SiO2 films
| Authors | |
|---|---|
| Year of publication | 2005 |
| Type | Article in Periodical |
| Magazine / Source | Applied Surface Science |
| MU Faculty or unit | |
| Citation | |
| Field | Solid matter physics and magnetism |
| Keywords | ellipsometry; reflectometry; ion plating; SiO2/glass interface; change of refractive index; plasma-assisted deposition; Schott B270 |
| Description | High-density reactive ion plating was used for SiO2 coating of Schott B270 glass. Optical properties of the sample were intensively studied by spectroscopic ellipsometry, reflectance and transmittance. Several optical models accounting for different structural defects, i.e., (1) gradient profile of refractive index in SiO2 layer, (2) transition layer between SiO2 and glass, and (3) induced slow variation of glass refractive index close to SiO2/glass interface were considered. The last one with increased value of substrate refractive index gave the best correspondence with the experimental data. (c) 2004 Elsevier B.V. All rights reserved. |
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