Deposition and Characterisation of Nanostructured silicon-oxide Containing Diamond-like Carbon Coatings

• Authors: BURŠÍKOVÁ Vilma; ZAJÍČKOVÁ Lenka; FRANTA Daniel; JANČA Jan; BURŠÍK Jiří; KLAPETEK Petr; BLÁHOVÁ Olga; PEŘINA Vratislav; NAVRÁTIL Vladislav
• Year of publication: 2006
• Type: Article in Proceedings
• Conference: 7th International Balkan Workshop on Applied Physics - Abstracts
• MU Faculty or unit: Faculty of Education
• Field: Plasma physics
• Keywords: PECVD; Nanostructured silicon-oxide Containing Diamond-like Carbon; thin films; mechanical properties; tribological properties;RBS; ERDA
• Description: Deposition and Characterisation of Nanostructured silicon-oxide Containing Diamond-like Carbon Coatings was studied in this work by means of measurements of mechanical, optical and electrical properties of Thin Films.

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