Publication details
Analysis of the Transport of Ionized Titanium Atoms in a Highly Ionized Sputter Deposition Process
| Authors | |
|---|---|
| Year of publication | 2007 |
| Type | Article in Periodical |
| Magazine / Source | Plasma processes and polymers |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | ambipolar difussion; charged particle transport; high power pulsed; magnetron sputtering |
| Description | The paper study transport of ionized sputtered particles by means of time and space resolved optical absorption spectroscopy - we concluded that the transport is govern maainly by ambipolar difussion. |
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