Publication details
Multiplate misalignment artifacts in rotating-complensator ellipsometry: Analysis and data treatment
| Authors | |
|---|---|
| Year of publication | 2008 |
| Type | Article in Periodical |
| Magazine / Source | physica status solidi (c) |
| MU Faculty or unit | |
| Citation | |
| Field | Solid matter physics and magnetism |
| Keywords | ellipsometry; rotating compensator |
| Description | Rotating compensator ellipsometry using multi-plate retarders can suffer from various artifacts. Our measurements in the range from 1.4 to 6.2 eV revealed spurious oscillations in ellipsometric parameters. We assign these oscillations to the angular misalignment between the individual plates of the retarder. A simple model using Mueller matrix framework is constructed to describe the observed effects and to elucidate the origin of the artifacts. The model is used to predict the impact of the artifacts on the results of signal analysis, and a calibration procedure is presented. Finally, the knowledge of the origin of the artifacts has been successfully used to reduce substantially the spurious oscillations in measured data. |
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