Publication details

Modeling of Radial Variation of Target Poisoning During Reactive Sputtering Deposition Process

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Authors

VAŠINA Petr HYTKOVÁ Tereza ELIÁŠ Marek

Year of publication 2008
Type Article in Proceedings
Conference 19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases - Book of Abstracts
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords reactive magnetron sputering; target
Description Modeling of Radial Variation of Target Poisoning During Reactive Sputtering Deposition Process, proceeding, interdisciplinary study of plasma physics
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