Modeling of Radial Variation of Target Poisoning During Reactive Sputtering Deposition Process

• Authors: VAŠINA Petr; HYTKOVÁ Tereza; ELIÁŠ Marek
• Year of publication: 2008
• Type: Article in Proceedings
• Conference: 19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases - Book of Abstracts
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: reactive magnetron sputering; target
• Description: Modeling of Radial Variation of Target Poisoning During Reactive Sputtering Deposition Process, proceeding, interdisciplinary study of plasma physics

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