Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD

• Authors: KELAR Lukáš; BURŠÍKOVÁ Vilma; BOCHNÍČEK Zdeněk
• Year of publication: 2008
• Type: Article in Proceedings
• Conference: CESPC II - Book of extended abstracts
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: carbon films ;PECVD
• Description: Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD

Related projects

• Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
• Multiscale approach to relationships between mechanical and microstructural characteristics of materials
• Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges