Advanced modeling of reactive sputtering process with non-linear discharge current density

• Authors: SCHMIDTOVÁ Tereza; VAŠINA Petr; ELIÁŠ Marek
• Year of publication: 2008
• Type: Article in Periodical
• Magazine / Source: Chemické Listy
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: reactive magnetron sputtering
• Description: Advanced modeling of reactive sputtering process with non-linear discharge current density, paper, interdisciplinary study of plasma physics, magnetron discharges

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