Wireless temperature measurement in the hot filament CVD reactor for deposition of carbon nanotubes

• Authors: KOLMAČKA Michal; KADLEČÍKOVÁ Magdaléna; BREZA Juraj; LAZIŠŤAN Filip; ZAJÍČKOVÁ Lenka; ELIÁŠ Marek; JESENÁK Karol; PASTORKOVÁ Katarína
• Year of publication: 2009
• Type: Article in Periodical
• Magazine / Source: Journal of Electrical Engineering
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: carbon nanotubes; chemical vapour deposition; isolation amplifier
• Description: The experimental work deals with measuring the temperature in the hot filament chemical vapour deposition (HF CVD) reactor by a purpose-built electronic circuit. The objective is to optimize the substrate temperature, one of the key technological parameters in the synthesis of carbon nanotubes. The main outcome of the work is the design and construction of a functional thermometer, its precision calibration and improved accuracy of temperature measurement.

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