Publication details
Acquisition of the Angular Distribution of Backscattered Electrons in the Scanning Low Energy Electron Microscope
| Authors | |
|---|---|
| Year of publication | 2006 |
| Type | Article in Proceedings |
| MU Faculty or unit | |
| Citation | |
| Field | Electronics amd optoelectronics, electrotechnics |
| Keywords | SLEEM; cathode lens; multichannel detector; angular distribution; BSE detection |
| Description | New eight-channel detector for acquisition of the angular distribution of backscattered electrons has been designed and tested. The detector is based on a multi-channel plate followed by eight concentric circular collectors centred to the optical axis. High collection efficiency and high amplification of the detector down to 100 eV of emission energy is secured by action of the cathode lens. In first experiments the detector has proved itself useful for imaging of polycrystalline structures. |