Publication details
Defect Engineering in Czochralski-grown Silicon Studied by TEM
| Authors | |
|---|---|
| Year of publication | 2010 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | As a part of a complex study of nucleation and growth of oxygen precipitates in Czochralski-grown silicon this work reports our latest results obtained by TEM. |
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