Povrchová plazmová úprava krystalických křemíkových desek určených pro výrobu solárních článků

• Title in English: Plasma treatment of crystalline silicon wafers for production of solar cells
• Authors: SKÁCELOVÁ Dana; SŤAHEL Pavel; HANIČINEC Martin; BAŘINKOVÁ Pavlína; ČERNÁK Mirko
• Year of publication: 2010
• Type: Article in Proceedings
• Conference: Sborník příspěvků z 5. České fotovoltaické konference
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics
• Keywords: Crystalline silicon atmospheric pressure plasma surface modification
• Description: Contribution focused to application of atmospheric plasma in semiconductor industry, especially in production of solar cells. Plasma modification of surface properties of silicon wafers by DCSBD was investigated. This process makes all surfaces totaly wettable. Surface free energy was studied by contact angle measurement.

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