Publication details
Effect of plasma treatment on the surface morphology and wettability of (111) and (100) silicon wafers
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| Year of publication | 2011 |
| Type | Conference abstract |
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| Citation | |
| Description | This paper is focused on the plasma treatment of silicon surface. The effect of plasma treatment in dependence of the different crystallographic orientation of silicon surface,(100) plane and (111) plane is compare |
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