Publication details
On the effect of carbon content on the mechanical properties of nc-TiC/a-C:H coatings prepared by balanced magnetron sputtering
| Authors | |
|---|---|
| Year of publication | 2011 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | Thick hard adherent nc-TiC/a-C:H coatings were prepared by a hybrid PVD-PECVD process of Ti target sputtering in Ar/C2H2 atmosphere. The effect of carbon content on mechanical properties such as hardness, Young’s modulus and internal stress is studied in this contribution. |
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