Reaction of higher harmonic frequencies on thin films

• Authors: DVOŘÁK Pavel; ŽEMLIČKA Radek; BURŠÍKOVÁ Vilma; VAŠINA Petr; ŠPERKA Jiří
• Year of publication: 2011
• Type: Conference abstract
• MU Faculty or unit: Faculty of Science
• Description: Reaction of higher harmonic frequencies on creation or destruction of thin films.

Related projects

• Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
• Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges