Publication details
Hydrogenation of platinum introduced in silicon by radiation enhanced diffusion
| Authors | |
|---|---|
| Year of publication | 2009 |
| Type | Article in Periodical |
| Magazine / Source | Materials Science and Engineering |
| MU Faculty or unit | |
| Citation | |
| Doi | http://dx.doi.org/10.1016/j.mseb.2008.11.038 |
| Field | Electronics amd optoelectronics, electrotechnics |
| Keywords | diffusion; hydrogenation; platinum; silicon |
| Description | The paper deals with hydrogenation of platinum atoms introduced in silicon by radiation enhanced diffusion. The interaction of defects and arising deep levels are investigated by means of deep level transient spectroscopy. |
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