Publication details

Hydrogenation of platinum introduced in silicon by radiation enhanced diffusion

Authors

HAZDRA Pavel KOMARNITSKYY Volodymyr BURŠÍKOVÁ Vilma

Year of publication 2009
Type Article in Periodical
Magazine / Source Materials Science and Engineering
MU Faculty or unit

Faculty of Science

Citation
Doi http://dx.doi.org/10.1016/j.mseb.2008.11.038
Field Electronics amd optoelectronics, electrotechnics
Keywords diffusion; hydrogenation; platinum; silicon
Description The paper deals with hydrogenation of platinum atoms introduced in silicon by radiation enhanced diffusion. The interaction of defects and arising deep levels are investigated by means of deep level transient spectroscopy.
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