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Informace o publikaci
Diagnostics of Radio Frequency Oxygen Plasma by Optical Emission Spectroscopy
Autoři | |
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Rok publikování | 2001 |
Druh | Článek ve sborníku |
Konference | WDS'01 Proceedings of Contributed Papers |
Fakulta / Pracoviště MU | |
Citace | |
Obor | Fyzika plazmatu a výboje v plynech |
Klíčová slova | rf plasma; emission sectroscopy; rotational temperature; actinometry |
Popis | Low pressure radio-frequency plasma produced in a capacitively coupled planar reactor has been studied by optical emission spectroscopy. Rotational temperature of oxygen molecule has been estimated at pressure 37 Pa and rf power 100-450 W. Concentration of atomic oxygen atom was monitored by actinometry. |
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