Project information
Plasma deposition of protective coatings: characterisation of prepared films and diagnostics of reactive plasmas used
- Project Identification
- GA202/00/P037
- Project Period
- 1/2000 - 1/2002
- Investor / Pogramme / Project type
-
Czech Science Foundation
- Standard Projects
- MU Faculty or unit
- Faculty of Science
The plasmachemical deposition of protective coatings in different types of discharges (radiofrequency capacitively or inductively coupled glow discharges at decreased pressure, microwave and barrier discharges, atmospheric pressure glow discharge APG, p lasma pencil) will be studied. The first main part of the project is the preparation of a multilayer system protecting polycarbonate against mechanical damages and degradation by UV radiation. Some organosilicon compounds, e.g. hexamethyldisiloxane will be used as monomer. The result should be a graduated layer transparent in the visible, well adherent to polycarbonate and with the hardness comparable to glass. The second main part of the research is the deposition of superhard films such as amorphous d iamond like carbon (DLC) films, DLC with addition of silicon, nanocomposite films based on CNx and microcrystalline diamond films. The study of optical and mechanical film properties as well as their composition and structure will be supplemented by plas
Publications
Total number of publications: 21
2003
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Dependence of the Normalized Absorbance of the DLC:SiOx Thin Films on the Flow Rate of HMDSO
JUNIORMAT 03, year: 2003
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Study of Plasma Polymerization from Acetylene in Pulsed RF Discharges
Thin Solid Films, year: 2003, volume: 2003, edition: 425
2002
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Improvement of the efficiency of the silicon solar cells by silicon incorporated diamond-like carbon antireflective coatings
Journal of Non-Crystalline Solids, year: 2002, volume: 2002, edition: 299-302
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Mode Transition in Low-pressure RF Capacitive Discharge in Nitrogen
Europhysics Conference Abstracts 26B, year: 2002
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Optical characterization of diamond like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry
Diamond and Related Materials, year: 2002, volume: 11, edition: 1
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Rf sputtering of composite SiOx/plasma polymer films and their basic properties
Surface & coatings technology, year: 2002, volume: 2002, edition: 151-152
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Temperature dependence of mechanical properties of DLC/Si protective coatings prepared by PECVD
Materials Science and Engineering A, year: 2002, volume: 2002, edition: 324
2001
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Deposition of DLC:Si(O) Films in Low Pressure Discharges
Proceedings of 13th Symposium on Application of Plasma Processes, year: 2001
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Deposition Process Based on Organosilicon Precursors in Dielectric Barrier Discharges at Atmospheric Pressure - A Comparison
Plasmas and Polymers, year: 2001, volume: 6, edition: 4
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Diagnostics of Radio Frequency Oxygen Plasma by Optical Emission Spectroscopy
WDS'01 Proceedings of Contributed Papers, year: 2001