Publication details
Influence of defects of thin films on determining their thickness by the method based on white light interference
| Title in English | Influence of defects of thin films on determining their thi ckness by the method based on white light interference |
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| Authors | |
| Year of publication | 1993 |
| Type | Article in Periodical |
| Magazine / Source | J. Phys. D: Appl. Phys. |
| MU Faculty or unit | |
| Citation | |
| Field | Solid matter physics and magnetism |
| Keywords | thin films |
| Description | Method of determining the thickness of a thin film by white light interference. Influence of defects. |