Kinetika reakcí plynné fáze O_2+TEOS v řízeném rf reaktoru s elektronovou spinovou rezonancí

• Title in English: Kinetics of O_2 + TEOS gas-phase chemical reactions in remote RF plasma reactor with electron spin resonance
• Authors: JANČA Jan; TÁLSKÝ Antonín; ZVONÍČEK Vilém
• Year of publication: 1996
• Type: Article in Periodical
• Magazine / Source: Plasma Chemistry and Plasma Processing
• MU Faculty or unit: Faculty of Science
• Field: Plasma physics

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