Mgr. Peter Klein, Ph.D.
Výzkumný pracovník II, Deposition of Thin films and Nanostructures
Publications
Total number of publications: 89
2015
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Spokes and cathode voltage and discharge current oscillations in HiPIMS
Year: 2015, type: Conference abstract
2014
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Determination of sputtered species densities in a HIPIMS discharge by optical emission spectroscopy
Year: 2014, type: Conference abstract
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Determination of sputtered species densities in HIPIMS discharge by optical emission spectroscopy
Year: 2014, type: Conference abstract
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On periodic oscillations observed on cathode voltage and discharge current during HIPIMS process
Year: 2014, type: Conference abstract
2013
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Evolution of discharge current in high power impulse magnetron sputtering
PAPN 2013: Book of extended abstracts, year: 2013
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On sputtered particle distribution towards substrate during target erosion - simulation and experiment
PAPN 2013: Book of extended abstracts, year: 2013
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ON SPUTTERED PARTICLE DISTRIBUTION TOWARDS SUBSTRATE DURING TARGET EROSION - SIMULATION AND EXPERIMENT
Year: 2013, type: Conference abstract
2012
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Feedback system to control reactive magnetron sputtering
Potential and Applications of Surface Nanothreatment of Polymers and Glass, year: 2012
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Monitoring and control of RF driven PVD, PECVD and etching plasmas using Fourier components of discharge voltages
Year: 2012, type: Conference abstract