Project information
Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev
- Project Identification
- GAP205/12/0407
- Project Period
- 1/2012 - 12/2016
- Investor / Pogramme / Project type
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Czech Science Foundation
- Standard Projects
- MU Faculty or unit
- Faculty of Science
Tento projekt je zaměřen na studium chování hybridního PVD-PECVD procesu, který bude využit pro přípravu nanostrukturovaných kompozitních materiálů typu n-MC/a-C(:H). Hlavním cílem tohoto projektu je provést rozsáhlou diagnostiku depozičního plazmatu a porozumět souvislostem mezi parametry depozičního procesu, vlastnostmi depozičního plazmatu a vlastnostmi deponovaných vrstev.
Publications
Total number of publications: 60
2014
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Study of the thermal dependence of mechanical properties, chemical composition and structure of nanocomposite TiC/a-C:H coatings (Reprinted from Surface & Coatings Technology, vol 242, pg 62-67, 2014)
Surface & coatings technology, year: 2014, volume: 255, edition: September, DOI
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Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools
Surface & coatings technology, year: 2014, volume: 256, edition: October, DOI
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Understanding of hybrid PVD–PECVD process with the aim of growing hard nc-TiC/a-C:H coatings using industrial devices with a rotating cylindrical magnetron
Surface & Coatings Technology, year: 2014, volume: 255, edition: September, DOI
2013
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Comparison of nc-TiC/a-C:H nanocomposite coatings deposited by DC magnetron sputtering at low and high flux of impinging ions
Year: 2013, type: Conference abstract
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Evolution of discharge current in high power impulse magnetron sputtering
PAPN 2013: Book of extended abstracts, year: 2013
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Hybrid PVD-PECVD Process and Its Applications for Carbon Rich Nanocomposite Thin Film Deposition
Year: 2013, type: Conference abstract
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INFLUENCE OF Cu AND Ni DOPING ON PROPERTIES OF Ti-C NANOCOMPOSITE COATING PREPARED BY HYBRID PVD-PECVD PROCESS
Year: 2013, type: Conference abstract
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INFLUENCE OF Ni DOPING ON PROPERTIES OF Ti-C NANOCOMPOSITE COATING PREPARED BY HYBRID PVD-PECVD PROCESS
PAPN 2013: Book of Extended Abstracts, year: 2013
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Non-monotonous evolution of hybrid PVD – PECVD process characteristics on hydrocarbon supply
Surface & coatings technology, year: 2013, volume: 2013, edition: 232, DOI
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Novel method of reactive magnetron sputtering process control
Year: 2013, type: Conference abstract