Project information
Porozumění hybridnímu PVD-PECVD procesu s cílem řídit růst nanostrukturovaných kompozitních vrstev
- Project Identification
- GAP205/12/0407
- Project Period
- 1/2012 - 12/2016
- Investor / Pogramme / Project type
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Czech Science Foundation
- Standard Projects
- MU Faculty or unit
- Faculty of Science
Tento projekt je zaměřen na studium chování hybridního PVD-PECVD procesu, který bude využit pro přípravu nanostrukturovaných kompozitních materiálů typu n-MC/a-C(:H). Hlavním cílem tohoto projektu je provést rozsáhlou diagnostiku depozičního plazmatu a porozumět souvislostem mezi parametry depozičního procesu, vlastnostmi depozičního plazmatu a vlastnostmi deponovaných vrstev.
Publications
Total number of publications: 60
2013
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On sputtered particle distribution towards substrate during target erosion - simulation and experiment
PAPN 2013: Book of extended abstracts, year: 2013
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ON SPUTTERED PARTICLE DISTRIBUTION TOWARDS SUBSTRATE DURING TARGET EROSION - SIMULATION AND EXPERIMENT
Year: 2013, type: Conference abstract
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Preparation of hard nc-TiC/a-C:H coatings using hybrid PVD-PECVD process with rotating cylindrical magnetron
Year: 2013, type: Conference abstract
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Preparation of hard TiC/a-C:H coatings using hybrid PVD-PECVD process with rotating cylindrical magnetron
Year: 2013, type: Conference abstract
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Study of the thermal dependence of mechanical properties, chemical composition and structure of the nanocomposite TiC/a-C:H coatings
Year: 2013, type: Conference abstract
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TF-P2-17 Preparation of Hard nc-TiC/a-C:H Coatings Using Hybrid PVD-PECVD Process with Rotating Cylindrical Magnetron
Year: 2013, type: Conference abstract
2012
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Comparison of nc-TiC/a-C:H coatings prepared by magnetron sputtering in well balanced and highly unbalanced magnetic field
Potential and Applications of Surface Nanotreatment of Polymers and Glass: Book of Extended Abstracts, year: 2012
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Comparison of nc-TiC/a-C:H Films Prepared by PVD-PECVD Process at Low and High Ion Bombardment
Year: 2012, type: Conference abstract
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Experimental study of DC driven hybrid PVD-PECVD process
Year: 2012, type: Conference abstract
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Feedback system to control reactive magnetron sputtering
Potential and Applications of Surface Nanothreatment of Polymers and Glass, year: 2012