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prof. Mgr. Petr Vašina, Ph.D.
ředitel ústavu – Ústav fyziky a technologií plazmatu
kancelář: pav. 06/01025
Kotlářská 267/2
611 37 Brno
telefon: | 549 49 6479 |
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sociální a akademické sítě: |
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Počet publikací: 385
2005
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Characterisation of nitrogen-oxygen flowing afterglow
Abstracts and full papers CD of 17th International Symphosium on Plasma Chemistry, rok: 2005
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Influence of the pulse duration of fast high power magnetron discharge on the amount of ion collected on the substrate
Proceeding of 27th International Conference on Phenomena in Ionised Gases, rok: 2005
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Investigation of High Power Pulsed Microwave Discharge
Abstracts of Frontiers in Low Temperature Plasma Diagnostics VI, rok: 2005
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Ionized physical vapor deposition by high power fast pulsed magnetron discharge
Actes du workshop Nouveaux oxydes a forte permittivite dans l integration des semi-conducteurs, rok: 2005
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Modeling of high power pulsed microwave discharge
Abstracts and full paper CD of 17th International Symphosium on Plasma Chemistry, rok: 2005
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Preionised pulsed magnetron discharges for ionised physical vapour deposition
Journal of Optoelectronics and Advanced Materials, rok: 2005, ročník: 7, vydání: 5
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Reduction of transient regime in fast preionized high power pulsed magnetron discharge
Europhysics Letters, rok: 2005, ročník: 72, vydání: 3
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Role of Oxygen Admixture on Nitrogen Afterglow
Book of Contributed Papers of 15th Symphosium on Applications on Plasma Processes and 3rd EU-Japan Joint Symphosium on Plasma Processing, rok: 2005
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Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements
Plasma Sources Science and Technology, rok: 2005, ročník: 14, vydání: 2
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Spectroscopic analysis of a pulsed magnetron discharge
Journal of Optoelectronics and Advanced Materials, rok: 2005, ročník: 7, vydání: 5