prof. Mgr. Petr Vašina, Ph.D.
Department head, Department of Plasma Physics and Technology
Office: pav. 06/01025
Kotlářská 267/2
611 37 Brno
Phone: | +420 549 49 6479 |
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social and academic networks: |
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Total number of publications: 387
2010
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Monitoring of magnetron target poisoning by measurement of higher harmonics of discharge voltages
Plasma Sources Sci. Technol., year: 2010, volume: 19, edition: 5
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Monitoring of PVD, PECVD and etching plasmas using Fourier components of RF voltage
Plasma Physics and Controlled Fusion, year: 2010, volume: 52, edition: 12, DOI
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Plasma diagnostics using electron paramagnetic resonance
Journal of Physics D: Applied physics, year: 2010, volume: 43, edition: 12
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Preparation of self-adhesive nc-TiC/a-C:H coatings
Potential and Applications of Thin Ceramic and Metal Coatings, year: 2010
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Suppressed hysteresis behaviour of Ti sputtering in acetylene gas
Year: 2010, type: Conference abstract
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Time resolved investigations of high power pulsed microwave discharge in nitrogen and neon
Proceedings of 24th Symposium on Plasma Physics and Technology, year: 2010
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Time resolved spectroscopy of high power pulsed microwave discharge in nitrogen
Proceedings of 20th Escampig, year: 2010
2009
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Harmonic analysis of discharge voltages as a tool to control the RF sputtering deposition process
Europhysics Letters, year: 2009, volume: 85, edition: 1
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Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process
Book of Contributed Papers of 17th Symposium on Applications of Plasma Processes, year: 2009
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Higher harmonics of discharge voltage as tool to control accurately state of RF sputtering deposition process
Year: 2009, type: Conference abstract