prof. Mgr. Petr Vašina, Ph.D.

2009

• Hybrid PVD-PECVD sputtering deposition process - from properties of deposited films to process characteristics

  ELIÁŠ Marek SOUČEK Pavel VAŠINA Petr

  Article in Proceedings

  Book of Abstracts, Frontiers in Low Temperature Plasma Diagnostics 8, year: 2009

• Is it possible to control degree of target poisoning during RF reactive magnetron sputtering by higher harmonic frequencies of discharge voltage?

  VAŠINA Petr DVOŘÁK Pavel

  Article in Proceedings

  Frontiers in Low Temperature Plasma Diagnostics 8 - Book of abstracts, year: 2009

• Modeling of reactive magnetron sputtering deposition process - different target utilization, situation when O2 and H2 are added simultaneously

  VAŠINA Petr SCHMIDTOVÁ Tereza

  Conference abstract

  Year: 2009, type: Conference abstract

• Modelling of surface processes taking place during reactive magnetron sputtering deposition process with simultaneous adding of hydrogen and oxygen

  SCHMIDTOVÁ Tereza VAŠINA Petr

  Article in Proceedings

  Book of Abstracts, Frontiers in Low Temperature Plasma Diagnostics 8, year: 2009

• Modelling of the reactive sputtering process with non-uniform discharge current density and different temperature conditions

  VAŠINA Petr SCHMIDTOVÁ Tereza ELIÁŠ Marek

  Article in Periodical

  Plasma Sources Science and Technology, year: 2009, volume: 18, edition: 2

• On the oxygen addition into nitrogen post-discharge

  MRÁZKOVÁ Martina VAŠINA Petr KUDRLE Vít TÁLSKÝ Antonín PINTASSILGO Carlos-Daniel GUERRA Vasco

  Article in Periodical

  Journal of Physics D: Applied Physics, year: 2009, volume: 42, edition: 7

• Plasma diagnostics using electron paramagnetic resonance

  KUDRLE Vít TÁLSKÝ Antonín JANČA Jan ZVONÍČEK Vilém KUDLÁČ Aleš KŘÁPEK Vlastimil VAŠINA Petr DOLEŽAL Vojtěch URBÁNEK Michal BOTOŠ Pavel MRÁZKOVÁ Martina DVOŘÁK Pavel

  Article in Proceedings

  Book of Abstracts, Frontiers in Low Temperature Plasma Diagnostics, year: 2009

• Reactive magnetron sputtering - modelling of different target utilization in metallic and compound mode and situation when oxygen and hydrogen are added simultaneously

  VAŠINA Petr SCHMIDTOVÁ Tereza

  Conference abstract

  Year: 2009, type: Conference abstract

• Spectroscopic investigation of high power pulsed microwave discharge

  HNILICA Jaroslav KUDRLE Vít NAVRÁTIL Zdeněk VAŠINA Petr

  Article in Proceedings

  Book of Abstracts, Frontiers in Low Temperature Plasma Diagnostics 8, year: 2009

• Suppressed hysteresis behaviour of titanium sputtering in acetylene gas.

  SCHMIDTOVÁ Tereza VAŠINA Petr

  Conference abstract

  Year: 2009, type: Conference abstract