prof. Mgr. Petr Vašina, Ph.D.
Department head, Department of Plasma Physics and Technology
Office: pav. 06/01025
Kotlářská 267/2
611 37 Brno
Phone: | +420 549 49 6479 |
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social and academic networks: |
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Total number of publications: 387
2008
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Influence of N2 and CH4 on depositon rate of boron based thin films prepared by magnetron sputtering
Chemické listy, year: 2008, volume: 102, edition: S4
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Ionization Processes and Plasma Chemistry in Pulsed RF Glow Discharge TOF Mass Spectroscopy for Thin Film Depth Profile Analyses
Book of Abstracts, Second Central European Symposium on Plasma Chemistry, year: 2008
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Limits for H, N, O and O2 Detection by Means of Electron Paramagnetic Resonance
19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases - Book of Abstracts, year: 2008
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Measurement of Fundamental and Higher Harmonic Frequencies as Tool to Control RF Sputtering Deposition Process
Programme and Abstract Book of the 23rd Symposium on Plasma Physics and Technology, year: 2008
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Modeling of Radial Variation of Target Poisoning During Reactive Sputtering Deposition Process
19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases - Book of Abstracts, year: 2008
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Modeling of reactive sputtering process with non-linear discharge current density
Book of Extended Abstracts of 2nd Central European Symposium on Plasma Chemistry, year: 2008
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Nitrogen Atom Behaviour in N2 Post-Discharge
19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases - Book of Abstracts, year: 2008
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Processes in afterglow of N2-O2 discharges
Book of Extended Abstracts of 2nd Central European Symposium on Plasma Chemistry, year: 2008
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Role of Neutral Gas Temperature on Hysteresis Behaviour of Reactive Sputtering Deposition Process
Programme and Abstract Book of 23rd Symposium on Plasma Physics and Technology, Prague, Czech Republic, 16.-19.June 2008, year: 2008
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Self-consistent spatio-temporal simulation of pulsed microwave discharge
Journal of Physics D: Applied Physics, year: 2008, volume: 41, edition: 1